Emcon 43-831 模塊
Emcon 43-831 模塊
Emcon 43-831 模塊
.開(kāi)放自動(dòng)化解決傳統(tǒng)控制器才能解決的問(wèn)題？
對(duì)于半導(dǎo)體與電子設(shè)備行業(yè)的復(fù)雜工藝而言，傳統(tǒng)的控制器方能完成—例如：
激光器的控制；
摻雜工藝中的等離子束、蒸汽等；
溫度控制器；
傳統(tǒng)的CNC和機(jī)器人控制器或者直線電機(jī)控制卡。
這些往往是因?yàn)閭鹘y(tǒng)PLC無(wú)法完成如此復(fù)雜算法而Windows又無(wú)法確保穩(wěn)定性而產(chǎn)生的各種控制器，也包括一些對(duì)于直線電機(jī)的控制卡。
事實(shí)上，從開(kāi)放架構(gòu)的視角來(lái)觀察這些控制器，所謂的“”通常是指在行業(yè)的工藝算法的集成，而非控制器本身，因此，*可以在開(kāi)放的PC架構(gòu)上來(lái)運(yùn)行，借助于PC的強(qiáng)大運(yùn)算處理能力，使得原有昂貴的控制器可以被逐漸替代，另外，控制器由于與現(xiàn)有系統(tǒng)集成所存在的通信能力、接口標(biāo)準(zhǔn)化方面的問(wèn)題也使得其被納入集成架構(gòu)成為必要，而開(kāi)放架構(gòu)的控制系統(tǒng)正提供了這一集成能力。
基于B&R的Automation Studio的算法設(shè)計(jì)能力，以及現(xiàn)有的庫(kù)集成，使得傳統(tǒng)的復(fù)雜算法可以在PLC、Power Panel、Panel PC上運(yùn)行，并且，可以在多個(gè)平臺(tái)之間可以實(shí)現(xiàn)軟件庫(kù)的共享。
Fitting Reducing Union, 8 mm x 6 mm Tube SWAGELOK SS-8M0-6-6M
Controller frequency inverter, 100HZ, 4 ARMS, 230 VAC, Flender Siemens OW 4/220X
Hardware NOVELLUS 02-132362-00 CU,ASSY,SNSR,EBR ARM AT EBR
PCB ASSY PCB 105 UNIT UDU15 TO UNIT CARDEDGE, 15 PIN MFG PFD
Cryogenics Hose HP He Flexline SS Braided SET 2 1.0 dia 25ft Cryogenic pump c
Lamp PORTABLE Weatherproof SEARCHLIGHT Rechargeable NiCAD w/3 lens covers CEAG
Regulator SMC ITV2011-31N3N4-X95 RGLTR ELECTRO-PNEU 15PSI 3/8MNPT 1-5VDC OUTPUT
Sensor Photoelectric switch AMPLIFIER E3C-JB4P/PNP/14MM, VOLTS: 12 TO 24VDC 2m
Pump PUMP MS50 4MS50SS-412-21211-200-36-3T6 SS CENTRIFUGAL 4-STAGE 2HP 3P MOTOR
Sensor Dispense SMARTPROBE ATMI 1.5L Resist bottle NOW TECHNOLOGIES SP4BDAEB-23
OEM Part SET Gauged RETAIN. RING UNTERTEIL FESTSt. GROOVED 9 total
Laser LASER LAMP KRYPTON, ROFIN SINAR LASER NL5023 L751015AKFC560003266
Pump Bellows Pump Teflon Medium Temp FPT connections PILLAR PE-20MA
OEM Part BASE, INNER HV, POLYSI, ESC- AME Cathode Etch P5000 APPLIED MATERIAL (A
PCB Schlumberger Systems A3517528000 SYSTEM CONTROL BOARD
OEM Part SGD, lower shower head, 300mm EMAX
Motor EBERHARD BAUER G063-10-0044-141 Motor 55W, 1350RPM, 230V 3ph, gear head
Motor MEGATORQUE MOTOR; 4011247; M-YS(YS SERIES MOTOR), 30(MOTOR SIZE #), 40(MA
OEM Part SGD, upper shower head, 300mm EMAX 0040-51148
Motor Inverter Drive Motor, Wash down Duty SS 1/3Hp, 3Ph, 3500 RPM, 230V 60H
PCB MICRO CONTROLLER CARD RSM30D, S-LINE/D-Li 62B/08-01, ROFIN SINAR LASER 79476
Hardware Thermo-Transfer-Foil Black (CS) 160mm x 600m
OEM Part ELECTRODE, UPPER Alpha 8 HIGH TEMP SCCM WEST COAST QUARTZ 81-10152A
Computer Accessory Adaptor fused DDR2 240 Slot Memory Tester Adapter Protector,
Valve Durholdt DN-50-100-103, FD 30006 Pinch Valve Pneumatic 2 in
Actuator Schlumberger Systems A3069810000 Z-AXIS LEAD SCREW KIT
OEM Part KIT,PM,PM SCAN BALLSCREW GENERAL,E11287030GEN
Motor PACIFIC SCIENTIFIC R32GENC-HS-ND Schlumberger Systems A0000010551 Brushle
OEM Part LINER, CATHODE, DIRECT-COOLED, BAFFLE, EHA, 300MM EMAX
Robot ARM ROBOT ASSY TRANSFER UNIT SK2000; DAINIPPON SCREEN (DNS) 2-39-64334 KAW
OEM Part RETAINER RING, GR30; X-0001-056-4701; GIIS-303mm-R
Power Supply POWER SUPPLY 24VDC 20A PS4, INPUT: 105/115/125VAC 47-440HZ, OUTPUT
Hose Hose Assy Heat Exchanger 7/8 dia 100ft SST 300mm
Power Supply Hilberling HN5001E Rofin Sinar Laser HN5001 20A, 330VDC 1800VDC B
Robot CONTROLLER Brooks/Equip Parts unit
GENMARK GB4 Single Robot - Missing lift motor and cover
OEM Part VME V21 CPU SYNERGY UP ASSY
Controller Portable operator interface -touch screen
Motor Servo motor with gearbox and encoder
Chiller Thermoelectric Circulator Water Chiller -DNS 2-39-53863 SMC INR-244-412
316L SS Pump with motor Franklin Electric 2Hp 3450RPM 1ST1G2A4GM Goulds
OEM Part Ferrofluidic Seal Vacuum Feed-through Spindle Shaft
OEM Part Ferrofluidic Seal Vacuum Feed-through Spindle Shaft
OEM Part Ferrofluidic Seal Vacuum Feed-through Spindle Shaft
Hardware Refrigeration coil 15in X 54in - Damaged
Computer Accessory Ultra 5 Ultrasparc Computer
Pump 316L SS Pump with motor Franklin Electric 2Hp 3450RPM GOULD PUMP 1ST1G2A4
Robot GENMARK GB4 Single Robot - Missing lift motor and cover Sold each not as l
Pump Teflon Double Diaphragm A25ETT ALMATEC
SOLDER HEAD, REPLACEABLE TIP CARTRIDGE STTC-538
1/4" MVCR-MVCR valve SST EVZS4R-GF4-GM4 HMJ Ham-Let
VALVE PFA UPM2-71212NO Furon
WATER FEEDTHRU 1683B CAROUSEL; DUFF-NORTON 3S7667K
TWEEZERS Precision SS 110MM 3CSA-SL
O-RING E35000477 Varian
BLOCK, REFERENCE 5x40 18-013761 For KLA TWI
Baratron Pressure Transducer 10 Torr +/- 15VDC KF25 625A-14059 MKS
Baratron +/- 15VDC 1000 Torr 625A13TBE S MKS
FLOWMETER, 807, 4000 l/hr DN 50 807-50-7-21-14-5-71 GEMU
Digital Instruments DTIPXM Laser
CABLE CONTROL 20M-60FT Shimadzu TMP 0620-01682 AMAT
Brooks Robot AMB107B and Controller ESC218B PRI-Equipe
Pump Piston 27.6 in. Hg vacuum, 100 psi, 1.6 CFM 115VAC 60hz Rietschle 688CE44
BRUSHLESS SERVO MOTOR PACIFIC SCIENTIFIC R46GENA-HS-NS-NV-00
Valve Pendulum Throttle W-Inlisys IQ NorCal 0190-17434 , AMAT
SERVO MOTOR AC with Gear Reduction Atlas- Copco AHR92E4-44S, Gysin GLP 090-1HB
PEDESTAL SST 8" 101 COVERAGE Applied Materials (AMAT) 0020-24913
Pump Service Tool Kit Trebor 960E 314398-004
Digital Charged Plate Monitor ION Systems Model 280A 91-0280-C
SANYO DENKI BL SUPER PU AMPLIFIER PU0C015NM61P00U SERVO Driver
SANYO DENKI BL SUPER PU AMPLIFIER PU0C015NM61P00U SERVO Driver
SPAN- Millipore LR300 24VDC MULTI-CHANNEL DISPLAY / CONTROLLER
BASE, INNER HV, POLYSI, ESC, ETCH AME Cathode (AMAT) 040-31911
Robot Brooks, PRI-Equipe ABM-107B-1-s-ce-s293 SN 26471
Robot Brooks, PRI-Equipe ABM-107B-1-s-ce-s293 SN 26473
Thermoelectric Circulator Water Chiller DNS 2-39-53863, SMC INR-244-412
Thermoelectric Circulator Water Chiller DNS 2-39-53863, SMC INR-244-412
UV-SPOT LIGHT SOURCE No Cables HAMAMATSU L6299-12 SN D626
FIBER OPTIC EEW 200W CABLE 1M- Hamamatsu L6299, BU4264C
Merlin M25 Recirculating Chiller, +5C to +35C Thermo NESLAB 262112030000
ACT 1300M/1600M Turbo Pump Controller, Adixen LAM 796-0099223-002 SN AC051744
ACT 1300M/1600M Turbo Pump Controller, Adixen LAM 796-0099223-001 SN 022403H
Filter Housing PFA 20in Pall Fluoro-Plus PFA2GFT12EH1 - No Flair Nuts
Wafer LIFT ASSY Kit 200MM PRODUCER Cathode Applied Materials AMAT
200mm wPEDESTAL ESC ASSY, 200MM NOTCH, WEB AMAT 0010-10202
Theta Z Piezo stage ORBOT (PDC Israel) Meteorology AMAT 4250370
KIT, TOOL AND CASE, PARALLELISM, VHP ROBOT 300mm Producer SE AMAT 0240-17585
ASSY ELECTRONIC HEATER/SUSCEPTOR LEVELING AMAT 0500-01083
KIT, CALIBRATION, HTR CENTERING/HAND-OFF, loadlock - process chamber AMAT 300mm
Ferrofluidic Seal Vacuum Feed-through Spindle Shaft Ferrotec B59599-11174 600487
Ferrofluidic Seal Vacuum Feed-through Spindle Shaft Ferrotec 52-132623D C29058
Ferrofluidic Seal Vacuum Feed-through Spindle Shaft Ferrotec 52-132623D 600575
MOTOR AC SERVO 200W, 2A, 200V 3000 RPM YASKAWA SGMP-02A312A
On-Board Module 208-230VAC 50-60Hz 5A 8132471G001 CTI-CRYOGENICS SN K08056011
Ultra High Vacuum Manual Valve Right Angle MKS UHV-40-ACC-EAVM
NDIR Endpoint Monitor Opti Sense 5000 InUSA 820-1104-01, AMAT 0190-08344 040881
