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5863E: Analog Thermal Mass Flow Meter, 100 - 1,000 slpm, Elastomer Seals

The Brooks Model 5863E elastomer sealed analog mass flow meter accuray measures gas flows of 100 - 1,000 slpm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.

布魯克斯模型5863E彈性體密封的模擬質(zhì)量流量計(jì)精確測(cè)量氣體流量10 - 100 SLPM。布魯克斯的極其穩(wěn)定的流量傳感器提供可靠，可重復(fù)和精確的流量測(cè)量，即使在不同的工藝條件。輸出為0 - 5 VDC。